Main Nanofab Cleanrooms consisting of:
- ISO 5 (class 100) yellow room
- ISO 6 (class 1000) yellow room
- ISO 6 (class 1000) white room
Electron Beam Lithography Cleanroom
- ISO 7 (class 10000) white room
- JEOL JBX-8100FX 100kV Electron Beam Lithography System
Packaging/Workhorse Processes Room
- ISO 7 (class 10000) softwall cleanroom /li>
- Evaporator, die-bonder, wirebonder, ECR etcher
- Dicing saw, multipurpose non-cleanroom space
