Heidelberg MLA-150 Maskless Lithography SystemType: Optical LithographyStatus: OnlineNote: (Laser issue getting resolved by Mario)
Neutronix-Quintel NxQ4006: 100mm mask aligner (currently single side)Type: Optical LithographyStatus: Online
LAURELL WS-400-6NPP-LITE: Photoresist spinnerType: Optical LithographyStatus: OnlineNote: Restricted to special processes
