Skip to content

News
Reserve Equipment
Contact

Capabilities
Safety
People
Partners
News
Contact

Become a Partner

Become a Partner

Current issues:

October 15, 2025 - DeeDirector is down: the loading shaft got mangled

Announcements:

New SLACK channel #training requests
Next Orientation Lecture: Monday, November 10, at 10:00 in room 488 - Contact qmi-anf_at_lists.ubc.ca to reserve a spot

Current Cleanroom Conditions:

Live conditions and updates

Home
Equipment
Page 3

Filters

Reset all×
Online×

Etching(6)
Metrology(6)
Optical Lithography(6)
Packaging(3)
Thermal Treatment(2)
Thin Film Deposition(4)
Wet Chemistry(3)

Offline(1)
Online(29)

Search

Search×

Equipment

DEKTAK XT: Profilometer with 3D capability and imaging

Type: Metrology

Status: Online

HEADWAY PWM32 and PWM50: Photoresist spinners

Type: Optical Lithography

Status: Online

EverBeing SR-4, Four-Point Probe

Type: Metrology

Status: Online

LAURELL WS-400-6NPP-LITE: Photoresist spinner

Type: Optical Lithography

Status: Online

Note: Restricted to special processes

EasyScan 2 AFM: Atomic Force Microscope

Type: Metrology

Status: Online

← Previous 1 2 3

Reserve Equipment

Equipment reservations are made through Bumblebee. Accessing outside of campus? Read this first.

Access Bumblebee

Capabilities
Safety
People
Partners
News
Contact

Become a Partner

Become a Partner

Reserve Equipment

Reserve Equipment

Capabilities
Safety
People
Partners
News
Contact

UBC Blusson QMI Advanced Nanofabrication Facility 
Vancouver Campus
2355 East Mall, Vancouver, BC Canada V6T 1Z4
anf@ampel.ubc.ca 
604 827 3228

About ANF

Capabilities
People
News

Partners

UBC Blusson QMI
AMPEL
Quantum Colab
Project Showcase

Support

Safety
Facility Status
Reserve Equipment

© 2026 Advanced Nanofabrication Facility (ANF) | Emergency Procedures | Terms of Use | UBC Copyright | AccessibilityWebsite by

Start typing and press enter to search

Search...