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Current issues:

October 15, 2025 - DeeDirector is down: the loading shaft got mangled

Announcements:

New SLACK channel #training requests
Next Orientation Lecture: Monday, November 10, at 10:00 in room 488 - Contact qmi-anf_at_lists.ubc.ca to reserve a spot

Current Cleanroom Conditions:

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Etching(6)
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Optical Lithography(6)
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Thin Film Deposition(4)
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Online(29)

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Equipment

Wetbench ISO-6 yellow room

Type: Wet Chemistry

Status: Online

Note: Test status note

Wetbench ISO-5 yellow room

Type: Wet Chemistry

Status: Online

Wetbench ISO-6 white room

Type: Wet Chemistry

Status: Online

ANNEALSYS AS-ONE: Rapid thermal processing (RTP) system

Type: Thermal Treatment

Status: Online

E-Beam Lithography System (JEOL JBX-8100FS)

Type: Optical Lithography

Status: Online

AJA Hybrid Evaporator System

Type: Thin Film Deposition

Status: Online

Oxford COBRA: ICP etcher

Status: Online

Tresky Die Bonder (Pick n’ Place) Tool

Type: Packaging

Status: Online

KSL-1100X: Box furnace

Type: Thermal Treatment

Status: Online

DEEDIRECTORS-2015: 8 source load-lock electron beam evaporator

Type: Thin Film Deposition

Status: Online

Heidelberg MLA-150 Maskless Lithography System

Type: Optical Lithography

Status: Online

Note: (Laser issue getting resolved by Mario)

TPT Wirebonder (wedge and ball wirebonding)

Type: Packaging

Status: Online

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UBC Blusson QMI Advanced Nanofabrication Facility 
Vancouver Campus
2355 East Mall, Vancouver, BC Canada V6T 1Z4
anf@ampel.ubc.ca 
604 827 3228

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